Inspection and Metrology Systems

Direct Drive Rotary Stages

ULT motors have supported direct drive rotary applications in precision metrology for semiconductor and solar system inspection for more than 8 years. Shortly after the millennium, smaller allotted space and lower profile spawned a new generation of direct drive rotary inspection systems. These systems were also coupled to linear motor drive gantry systems. Applimotion ULT motors pioneered these systems with some of the lowest low profile motors available at the time.

Analyzer and Polarizer Lens Positioning

ULT frameless motors and HO series direct drive motors with large through hole were designed with light conditioning in mind. Whether the customer is designing a custom polarizer system and integrating optics components, or they are looking for an already designed rotary stage disguised as a motor, Applimotion has a solution.

Linear Motor Pick and Place Platforms

Not all linear motors are equal. Applimotion linear motors were designed with high frequency response in mind. Routinely optimized to customer platform mechanical systems, Applimotion has no problem adjusting the mounting system or mechanical attributes. Step and settle applications benefit for high frequency response and high inherit natural frequencies.

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Large Rotary Inspection Platforms

Just when you thought you could not get a motor large enough, the LARC motors appeared from Applimotion. LARC motors are a combination of linear motor technology and rotor axial airgap motor technology. The benefit, large diameters with low profiles. Whether you need to move a limited angle, or you’re thinking of a large diameter moving magnet motor, the LARC motor is a solution.

Direct Drive Robots

ULT frameless motors and ULT-O outside rotating frameless motors are being used in many direct drive robot systems. Whether it is an in-tool wafer handling system or a machine to machine automated transfer, Applimotion motors are in use today. ULT motor solutions offer low profile, high performance with large through holes. Motor windings can be easily altered to work with voltages from 24-600 volts. Pole counts can be optimized to gain higher performance and better stiffness.

Turret Rotation

ULT-H high output direct drive frameless motors cover sizes from 15 mm to 535 mm diameter. All motors have large through holes and low profile. Whether it is a gimbal system or just a single axis of turret rotation, the ULT motors perform and deliver. Coupled to high resolution encoder systems and precision bearings, the performance and accuracy cannot be touched by traditional geared mechanical systems. Less parts, lower profile, and smoother operation are just the beginning of what can be done.

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Limited Angle Theta Axis

Applimotion specializes in designing and producing unique electromagnetic motors and actuators. Limited angle systems may require miniature single phase linear motors or voice coil type actuators. While no standard product line exists in these areas, Applimotion has years of experience designing and many designs available. Contact factory for special motor assemblies.

Elevator Lift Systems

Direct drive motors coupled to lead screws or ball screws can offer much higher performance and better reliability compared to traditional shafted motors coupled to the same translation system. Applimotion ULT-H and ULT motors fit perfectly with requirements and can electrically wound to handle the 2000-3000 rpm speed requirements of these systems.

Machine Stabilization

Electromagnetic single phase linear actuators from Applimotion can be used to stabilize your platform. If it is inspection, pick and place, dispensing, or any other large system that is sensitive to surrounding vibration. Applimotion custom linear actuators can de designed specific to the customer requirements. Contact factory for special actuator assemblies

Magnetic Components

Special coils, unique magnetic couplings, stators, magnetic/mechanical assemblies are all possible at Applimotion. Applimotion uses well skilled engineers with both design and manufacturing experience to design components and tooling. There are more than five different magnetic finite element solvers to choose from. Prototypes come within 5% of the simulations. With over 300 designs completed in the past 10 years, the history of success is compelling. Contact factory for custom motor component and sub assemblies

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